WIPO (World Intellectual Property Organization)
Method and system for facilitating the determination of the end-point in plasma etching process

Diego Zappa; Roberto Colombo; Giuseppe Fazio

WIPO (World Intellectual Property Organization) Method and system for facilitating the determination of the end-point in plasma etching process

Diego Zappa (Inventor), Roberto Colombo (Inventor), Giuseppe Fazio (Inventor)

Risultato della ricerca: Brevetto › Patent

Lingua originale	English
Numero di brevetto	2006/106556 A1
Stato di pubblicazione	Pubblicato - 12 ott 2006

Keywords

Microelettronics
Plasma etch process
Quality control

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title = "WIPO (World Intellectual Property Organization) Method and system for facilitating the determination of the end-point in plasma etching process",

keywords = "Microelettronics, Plasma etch process, Quality control, Microelettronics, Plasma etch process, Quality control",

author = "Diego Zappa and Roberto Colombo and Giuseppe Fazio",

year = "2006",

month = oct,

day = "12",

language = "English",

type = "Patent",

note = "2006/106556 A1",

}

TY - PAT

T1 - WIPO (World Intellectual Property Organization) Method and system for facilitating the determination of the end-point in plasma etching process

AU - Zappa, Diego

AU - Colombo, Roberto

AU - Fazio, Giuseppe

PY - 2006/10/12

Y1 - 2006/10/12

KW - Microelettronics

KW - Plasma etch process

KW - Quality control

KW - Microelettronics

KW - Plasma etch process

KW - Quality control

UR - http://hdl.handle.net/10807/15462

M3 - Patent

M1 - 2006/106556 A1

ER -