Spatial Defect Pattern Recognition on Semiconductor Wafers

Riccardo Borgoni; Diego Zappa; Luigi Radaelli

Spatial Defect Pattern Recognition on Semiconductor Wafers

Riccardo Borgoni, Diego Zappa, Luigi Radaelli

Risultato della ricerca: Contributo in rivista › Articolo › peer review

Abstract

NA

Lingua originale	Inglese
pagine (da-a)	61-67
Numero di pagine	7
Rivista	FUTURE FAB INTERNATIONAL
Stato di pubblicazione	Pubblicato - 2010

Keywords

CONTROL CHARTS
DEFETCT DISTRIBUTION
SPATIAL ANALYSIS

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@article{2e3c69c6db3a45dab93d3bcc87b3e6d0,

title = "Spatial Defect Pattern Recognition on Semiconductor Wafers",

abstract = "NA",

keywords = "CONTROL CHARTS, DEFETCT DISTRIBUTION, SPATIAL ANALYSIS, CONTROL CHARTS, DEFETCT DISTRIBUTION, SPATIAL ANALYSIS",

author = "Riccardo Borgoni and Diego Zappa and Luigi Radaelli",

year = "2010",

language = "English",

pages = "61--67",

journal = "FUTURE FAB INTERNATIONAL",

issn = "1363-5182",

publisher = "London : Technology Publishing Limited",

}

TY - JOUR

T1 - Spatial Defect Pattern Recognition on Semiconductor Wafers

AU - Borgoni, Riccardo

AU - Zappa, Diego

AU - Radaelli, Luigi

PY - 2010

Y1 - 2010

N2 - NA

AB - NA

KW - CONTROL CHARTS

KW - DEFETCT DISTRIBUTION

KW - SPATIAL ANALYSIS

KW - CONTROL CHARTS

KW - DEFETCT DISTRIBUTION

KW - SPATIAL ANALYSIS

UR - http://hdl.handle.net/10807/18701

M3 - Article

SN - 1363-5182

SP - 61

EP - 67

JO - FUTURE FAB INTERNATIONAL

JF - FUTURE FAB INTERNATIONAL

ER -

Spatial Defect Pattern Recognition on Semiconductor Wafers

Abstract

Keywords

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