Selection of a subgrid from a spatial monitoring process

Diego Zappa, Luigi Radaelli

Risultato della ricerca: Contributo in libroContributo a convegno

Abstract

We present a different approach that, even without the availability of starting experimental data, selects a sub-grid according to the criterion of spatial optimal coverage of the wafer surface (see also Walvoort, 2010). This approach may also include expert knowledge about those areas where production is less precise because of unavoidable technical reasons and hence may indicate where a higher sampling density must be assured. If sampling measures are available, a validation procedure can be used to select the best sub-map based for instance on the prediction error, by comparing the results obtained using the full and the reduced grid
Lingua originaleEnglish
Titolo della pubblicazione ospiteBook of abstract ITACOSM13
Pagine1-2
Numero di pagine2
Stato di pubblicazionePubblicato - 2013
EventoITACOSM13 - Milano
Durata: 26 giu 201328 giu 2013

Convegno

ConvegnoITACOSM13
CittàMilano
Periodo26/6/1328/6/13

Keywords

  • SUBRGID SELECTION

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