Abstract
We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.
Lingua originale | English |
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pagine (da-a) | 752-756 |
Numero di pagine | 5 |
Rivista | Microelectronic Engineering |
Volume | 86 |
DOI | |
Stato di pubblicazione | Pubblicato - 2009 |
Keywords
- DXRL
- Microneedles
- PMMA
- PVA
- Soft lithography