Poly vinyl alcohol re-usable masters for microneedle replication

Luca Gavioli, Mattia Fanetti, Michele Casella, Enzo Mario Di Fabrizio, Marco Matteucci, M. Casella, F. Gramatica, M. Tormen, G. Grenci, F. De Angelis, E. Di Fabrizio

Risultato della ricerca: Contributo in rivistaArticolo in rivistapeer review

33 Citazioni (Scopus)

Abstract

We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.
Lingua originaleEnglish
pagine (da-a)752-756
Numero di pagine5
RivistaMicroelectronic Engineering
Volume86
DOI
Stato di pubblicazionePubblicato - 2009

Keywords

  • DXRL
  • Microneedles
  • PMMA
  • PVA
  • Soft lithography

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