Poly vinyl alcohol re-usable masters for microneedle replication

Luca Gavioli; Mattia Fanetti; Michele Casella; Enzo Mario Di Fabrizio; Marco Matteucci; M. Casella; F. Gramatica; M. Tormen; G. Grenci; F. De Angelis; E. Di Fabrizio

doi:10.1016/j.mee.2009.01.068

Poly vinyl alcohol re-usable masters for microneedle replication

Luca Gavioli, Mattia Fanetti, Michele Casella, Enzo Mario Di Fabrizio, Marco Matteucci, M. Casella, F. Gramatica, M. Tormen, G. Grenci, F. De Angelis, E. Di Fabrizio

Risultato della ricerca: Contributo in rivista › Articolo in rivista › peer review

33 Citazioni (Scopus)

Abstract

We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.

Lingua originale	English
pagine (da-a)	752-756
Numero di pagine	5
Rivista	Microelectronic Engineering
Volume	86
DOI	https://doi.org/10.1016/j.mee.2009.01.068
Stato di pubblicazione	Pubblicato - 2009

Keywords

DXRL
Microneedles
PMMA
PVA
Soft lithography

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10.1016/j.mee.2009.01.068

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@article{c64bf79764664bae85527539105bab7a,

title = "Poly vinyl alcohol re-usable masters for microneedle replication",

abstract = "We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.",

keywords = "DXRL, Microneedles, PMMA, PVA, Soft lithography, DXRL, Microneedles, PMMA, PVA, Soft lithography",

author = "Luca Gavioli and Mattia Fanetti and Michele Casella and {Di Fabrizio}, {Enzo Mario} and Marco Matteucci and M. Casella and F. Gramatica and M. Tormen and G. Grenci and {De Angelis}, F. and {Di Fabrizio}, E.",

year = "2009",

doi = "10.1016/j.mee.2009.01.068",

language = "English",

volume = "86",

pages = "752--756",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier BV:PO Box 211, 1000 AE Amsterdam Netherlands:011 31 20 4853757, 011 31 20 4853642, 011 31 20 4853641, EMAIL: nlinfo-f@elsevier.nl, INTERNET: http://www.elsevier.nl, Fax: 011 31 20 4853598",

}

Poly vinyl alcohol re-usable masters for microneedle replication. / Gavioli, Luca; Fanetti, Mattia; Casella, Michele; Di Fabrizio, Enzo Mario; Matteucci, Marco; Casella, M.; Gramatica, F.; Tormen, M.; Grenci, G.; De Angelis, F.; Di Fabrizio, E.

In: Microelectronic Engineering, Vol. 86, 2009, pag. 752-756.

Risultato della ricerca: Contributo in rivista › Articolo in rivista › peer review

TY - JOUR

T1 - Poly vinyl alcohol re-usable masters for microneedle replication

AU - Gavioli, Luca

AU - Fanetti, Mattia

AU - Casella, Michele

AU - Di Fabrizio, Enzo Mario

AU - Matteucci, Marco

AU - Casella, M.

AU - Gramatica, F.

AU - Tormen, M.

AU - Grenci, G.

AU - De Angelis, F.

AU - Di Fabrizio, E.

PY - 2009

Y1 - 2009

N2 - We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.

AB - We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.

KW - DXRL

KW - Microneedles

KW - PMMA

KW - PVA

KW - Soft lithography

KW - DXRL

KW - Microneedles

KW - PMMA

KW - PVA

KW - Soft lithography

UR - http://hdl.handle.net/10807/4986

U2 - 10.1016/j.mee.2009.01.068

DO - 10.1016/j.mee.2009.01.068

M3 - Article

VL - 86

SP - 752

EP - 756

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -

Poly vinyl alcohol re-usable masters for microneedle replication

Abstract

Keywords

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