@inproceedings{160778f937a445caa0a678c002a7480a,
title = "Optimal reduction of a monitoring grid for SiO2 deposition surface over a wafer for semiconductor devices",
keywords = "Spatial processes, kriging methods, simulated annealing, Spatial processes, kriging methods, simulated annealing",
author = "Diego Zappa and Riccardo Borgoni and Luigi Radaelli and Valeria Tritto",
year = "2010",
language = "English",
isbn = "978 88 6129 566 7",
pages = "1--10",
booktitle = "SIS2010 Proceedings",
note = "SIS 2010 ; Conference date: 16-06-2010 Through 18-06-2010",
}