Non-parametric local capability indices for industrial planar manufacts: An application to the etching phase in the microelectronic industry

Computer Science

• Specifications 100%
• Production Process 50%
• Analysis Capability 50%
• Spatial Location 50%
• Microelectronics 50%
• Integrated Circuit 50%
• Fabrication Process 50%
• Contexts 50%
• Application 50%

Mathematics

• Statistical Dispersion 50%
• Parametric 50%
• Bayesian Paradigm 50%
• Quantile 50%
• Variables 50%
• Algorithm 50%