High-temperature nitrogen annealing induced bonding states and photoluminescence changes in inductively coupled plasma torch synthesized silicon nanostructures

Stefania Pagliara, Luigi Ermenegildo Sangaletti, Sonia Freddi, Giovanni Drera, Filippo Fabbri, Annalisa Cannizzaro, Marta Agati, Richard Dolbec, My Ali El Khakani, Simona Boninelli, Paola Castrucci

Risultato della ricerca: Contributo in rivistaArticolo in rivistapeer review

2 Citazioni (Scopus)

Abstract

In this work, we investigate the optical properties of self-standing Si nanostructures (SiNS) as-grown, by an inductively coupled plasma torch process, and after their annealing under N2 flux at 1200 °C. We show that as-grown SiNS are embedded in a silicon oxide shell while part of the annealed SiNS transforms into silicon nitrides or oxynitrides. The analysis of the photoluminescence spectra and maps of both as-grown and annealed SiNS enabled us to confirm the occurrence of quantum confinement effects in the ultra-small SiNS and to highlight the role played by the silicon oxide, silicon nitrides, and silicon oxynitrides nanophases in the photoluminescence emission.
Lingua originaleEnglish
pagine (da-a)024302-N/A
RivistaJournal of Applied Physics
Volume128
DOI
Stato di pubblicazionePubblicato - 2020

Keywords

  • nanowires
  • spectroscopy

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