Fabrication of an electro-optical Bragg modulator based on plasma dispersion effect in silicon

Gabriele Ciasca, Asaf Shahmoon, Ofer Limon, Luca Businaro, Yhonathan Azugi, Annamaria Gerardino, Zeev Zalevsky

Risultato della ricerca: Contributo in rivistaArticolo in rivista

5 Citazioni (Scopus)

Abstract

In this paper we present a design as well as the fabrication procedure of a new type of electro-optical modulator based on plasma dispersion effect. The device consists from a regular single mode silicon waveguide and periodically patterned electrodes made out an indium thin oxide (ITO) located along both sides of the optical core through which the photonic signal is propagating. By applying voltage on the electrodes a periodic change in the free electrons is occurred along the optical core. This change affects both the imaginary and real part of the refractive index resulting in the generation of periodic change in the refractive index that creates an effective Bragg reflector. Different fabrication strategies are reported.
Lingua originaleEnglish
pagine (da-a)107-112
Numero di pagine6
RivistaMicroelectronic Engineering
Volume105
DOI
Stato di pubblicazionePubblicato - 2013

Keywords

  • Modulators
  • ntegrated optics

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