Ag cluster beam deposition for TCO/Ag/TCO multilayer

G. Torrisi, Emanuele Cavaliere, F. Banfi, Francesco Banfi, Giulio Benetti, R. Raciti, Luca Gavioli, A. Terrasi, Antonio Terrasi

Risultato della ricerca: Contributo in rivistaArticolo in rivistapeer review

6 Citazioni (Scopus)


Environment friendly, thin and flexible devices require the synthesis of Indium-free new transparent conducting materials (TCM) with improved structural, thermal, electrical and optical properties. To overcome the critical issues raised by thinning the TCM, we propose a multilayer structure in which nanogranular Ag film obtained by supersonic cluster beam deposition is sandwiched in between Alluminum doped Zinc Oxide (AZO) thin layers. The introduction of the nanogranular Ag film, when compared to the standard sputtered one, yields higher optical transmittance in the technologically relevant VIS-NIR region and superior mechanical reliability while preserving low electrical resistance. The present results open new perspectives to exploit the nanogranular nature of conductive films, synthesized via Supersonic Cluster Beam Deposition, to engineer transparent conducting materials.
Lingua originaleEnglish
pagine (da-a)114-121
Numero di pagine8
RivistaSolar Energy Materials and Solar Cells
Stato di pubblicazionePubblicato - 2019


  • Cluster beam deposition
  • Electrical transport
  • Granular films
  • Mechanical reliability
  • Multilayer
  • Optics
  • Sputtering
  • Transparent conductive electrodes


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