Spatial Defect Pattern Recognition on Semiconductor Wafers

Diego Zappa, Riccardo Borgoni, Luigi Radaelli

Research output: Contribution to journalArticlepeer-review

Abstract

NA
Original languageEnglish
Pages (from-to)61-67
Number of pages7
JournalFUTURE FAB INTERNATIONAL
Publication statusPublished - 2010

Keywords

  • CONTROL CHARTS
  • DEFETCT DISTRIBUTION
  • SPATIAL ANALYSIS

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