Poly vinyl alcohol re-usable masters for microneedle replication

Marco Matteucci, Mattia Fanetti, M. Casella, Michele Casella, F. Gramatica, Luca Gavioli, M. Tormen, G. Grenci, F. De Angelis, E. Di Fabrizio, Enzo Mario Di Fabrizio

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)

Abstract

We present the first results of microstructure replica with re-usable masters in poly vinyl alcohol (PVA). Microneedles of heights ranging from 500 to 1100 pm were fabricated through double-exposure deep Xray lithography (DXRL) process and successfully replicated. A single PVA master was used as a template to successfully replicate up to 10 PMMA microneedle arrays, suggesting that this method might be a possible alternative to PDMS processes. A preliminary characterization of the relationship between the surface roughness of the substrates and the force required for demoulding was also performed. (C) 2009 Elsevier B.V. All rights reserved.
Original languageEnglish
Pages (from-to)752-756
Number of pages5
JournalMicroelectronic Engineering
Volume86
DOIs
Publication statusPublished - 2009

Keywords

  • DXRL
  • Microneedles
  • PMMA
  • PVA
  • Soft lithography

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