LogVariance modeling of wafer surface

Diego Zappa; Riccardo Borgoni; Luigi Radaelli; Valeria Tritto

LogVariance modeling of wafer surface

Diego Zappa
, Riccardo Borgoni
, Luigi Radaelli
, Valeria Tritto

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

N/A

Original language	English
Title of host publication	Statistical Methods applied in microelectronics
Pages	1
Number of pages	1
Publication status	Published - 2011
Event	Statistical Methods applied in microelectronics - Itala Duration: 13 Jun 2011 → 13 Jun 2011

Workshop

Workshop	Statistical Methods applied in microelectronics
City	Itala
Period	13/6/11 → 13/6/11

Keywords

logvariance model
spatial sampling

Cite this

@inproceedings{ec69d4d4776f41e3b9fbcb3a1ee009b5,

title = "LogVariance modeling of wafer surface",

abstract = "N/A",

keywords = "logvariance model, spatial sampling, logvariance model, spatial sampling",

author = "Diego Zappa and Riccardo Borgoni and Luigi Radaelli and Valeria Tritto",

year = "2011",

language = "English",

pages = "1",

booktitle = "Statistical Methods applied in microelectronics",

note = "Statistical Methods applied in microelectronics ; Conference date: 13-06-2011 Through 13-06-2011",

}

TY - GEN

T1 - LogVariance modeling of wafer surface

AU - Zappa, Diego

AU - Borgoni, Riccardo

AU - Radaelli, Luigi

AU - Tritto, Valeria

PY - 2011

Y1 - 2011

N2 - N/A

AB - N/A

KW - logvariance model

KW - spatial sampling

KW - logvariance model

KW - spatial sampling

UR - http://hdl.handle.net/10807/12430

M3 - Conference contribution

SP - 1

BT - Statistical Methods applied in microelectronics

T2 - Statistical Methods applied in microelectronics

Y2 - 13 June 2011 through 13 June 2011

ER -

LogVariance modeling of wafer surface

Abstract

Workshop

Keywords

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Cite this